A laser micromachining system was developed for universities and corporate research to fabricate microfluidic, MEMs, and medical devices in a rapid prototype fashion, with tolerances approaching 1 micron. Traditionally, MEMs devices are fabricated using traditional semiconductor lithography, but the multistep process takes significant time. The RapidX250 system uses a multiwavelength excimer laser (193 nm and 248 nm) to directly fabricate the structures in a single step, drastically reducing prototype time. Compared with other lasers and methods, the RapidX250 is very flexible, able to microfabricate 2-D parts (flat sheets, tubes) and 3-D parts (balloons, nonplanar surfaces), including XYZ, theta, and goniometer. At 193 nm laser wavelength, the laser can cleanly ablate fluoropolymers (such as nylon, pebax, and Teflon), bioabsorbable polymers, and glass.